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[Wafer Handling] > [Machines] > [Microscope illuminators]

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Microscope illuminators
Solid state illuminators

The new line of light sources and illuminators for microscopes and inspection are specially studied to replace conventional light sources.

Solid state sources are featured by constant color temperature, low power consumption and high efficiency.

Many types of illuminators and sources available for microscopy and inspection purposes.

Custom design illuminators available.

This kind of sources features low consumption and high lighting level, extremely long MTBF and the possibility to prepare illuminators with different light color generation for any special inspection needs.

We are able to supply standard light sources to replace fiber optics illuminators for microscopy applications, and special sources for wide area inspection such as wafer backside inspection.

The typical application/feature table is the following:

  • Microscopy illuminator: Source color White, 20 source points (or one single high power element with integrated lens), adjustable emission level, flexible arm mounting
  • Wafer macro inspection illuminator: Source color Green (also suitable for resist inspection), 150 source points (or 20 high power elements) adjustable emission level, custom mounting
  • Wafer edge inspection (crack detection): Source color: Red, 20 source points, adjustable emission level, custom mounting


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