Microscope loaders, also including macro inspection, with laser mapping and computer control, integrating SPC software, specially suitable for thin wafers;

Microscope Autoloaders, to integrate wafer loading and unloading directly into microscope tables;

Wafer macro inspection systems;

Frame UV irradiation machines for dicing process;

Inspection systems for wafers and chips, with programmable patterns, computer aided defect collection and SPC;

Wafer UV irradiation machines.