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[Wafer Handling] > [Workstation Components] > [Smartsheet]

Smartsheet
Table control systems
Proteus Frame

Easy run-sheet.

SMARTsheet system has been designed to be used as a sequence controller in semiconductor production plants.

SMARTsheet allows to eliminate the expensive and bulk paper runsheet, and implements a simple and reliable control of production flow, giving also an immediate availability of production data to any data processing system.

Sample Application

MAIN FEATURES:

Tracking and control of process sequence

Direct interface to any computer by standard RS-232 line

All formats information upload and download

Current fase verifying

Operator identification and recording

Equipment enable line

Stand alone compact unit

Rewritable batch solid state sheets up to 64Kb

Custom design available for lists and files

Real time clock


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