Automatic wafer Macro Inspection machine.

Proteus Macro Inspection is a small, table top machine for wafer macro inspection.

It have been especially studied for all that cases where is required a simple, fast and cost effective solution.

It features wafer tilt and rotation to optimize collimated light inspection and is mounted on a vibration free granite basement.

System is computer controlled, and its use and programming is really easy and user friendly. It is possible to edit and recall recipes, and each one includes inspection strategies (all wafers, fixed wafers and random access for statistical inspection) and handling parameters.

Proteus Macro is available in different versions, with single or double cassette (for automated rejected wafer storage), for wafers up to 8" (standard) or 12" (on request).